2DEG를 이용한 산화물 전자빔 나노 패터닝 제어

Title
2DEG를 이용한 산화물 전자빔 나노 패터닝 제어
Authors
장혜정백승협문선영이광엽김진연김도향장호원
Issue Date
2018-05
Publisher
한국재료학회지
URI
http://pubs.kist.re.kr/handle/201004/61361
ISSN
12250562
Appears in Collections:
KIST Publication > Conference Paper
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